A mass flow controller (MFC) is a device used to measure and control the flow of liquids and gases. A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates
MKS Mass-Flo controllers/meters can be used with any of several MKS electronics modules. These modules provide power and a set point signal to the mass flow controller.
The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus, EtherCAT, or DeviceNet I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range.
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