TOF-SIMS Technique

01 Overview

TOF-SIMS is an acronym for the combination of the analytical technique SIMS (Secondary Ion Mass Spectrometry) with Time of Flight mass analysis (TOF)

02 Details

TOF-SIMS is an acronym for the combination of the analytical technique SIMS (Secondary Ion Mass Spectrometry) with Time of Flight mass analysis (TOF). In different operational modes – surface spectroscopy, surface imaging, depth profiling, 3D analysis – this analysis technique offers unique features:

Information obtained

  • Detection of all elements and isotopes
  • Chemical information via molecular andcluster ions

Detection limits

  • PPM of a monolayer for elements
  • Sub-fmol for molecules

Detection limits

  • High lateral resolution (<60nm)
  • High surface sensitivity (<1nm)
  • High depth resolution (<1nm)