Mass Flow Controllers

01 Overview

Enabling our customer to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our mass flow controller (MFC) design philosophy.

02 Details

Enabling our customer to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our mass flow controller (MFC) design philosophy. The MKS family of mass flow controllers measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing. With features, functionality and performances to meet virtually any need, customers can expect reduced cost of ownership and better tool and process performance.

Mass Flow Products Types

  • ALTAT Digital, Thermal Mass Flow Controllers
  • Metal Sealed, Thermal Mass Flow Meters & Controllers
  • Elastomer Sealed, Thermal Mass Flow Meters & Controllers
  • pMFC Pressure-Insensitive Mass Flow Controllers (piMFC)
  • Pressure-Based Flow Controllers
  • In Situ Flow Verifiers
  • DELTAT Flow Ratio Control