Diffusion Pumps

Mass Spectrometers

Helium Leak Detection

Gas Flow Calibrators

Vacuum Gauges

Flanges & Fittings

Vacuum Fluids

Mass Flow Controllers
MKS Mass Flow Controller

MKS GE50A Mass-Flo Controller


General Purpose Mass-Flo Controller 

The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus?, EtherCAT?, or DeviceNet? I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding.

A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton? seals or optional Buna, Neoprene? or Kalrez? to support different gas requirements.

Features & Benefits

  • Patented thermal sensor design for exceptional zero stability
  • Percent of setpoint accuracy enables precise process control
  • Embedded user interface - easily change device range & user gas, monitor & measure performance

 

For more information download the PDF Brochure below

MKS GE50A Mass Flow Controller PDF Brochure

 

(JHB) +27 (0) 11 475 1823


(DBN) +27 (0) 31 301 7617


(CPT) +27 (0) 21 461 9607


Email: sales@vacutec.co.za